The mechanism of material removal of {001}
diamond surfaces etched in a flow of 10% oxygen in argon at atmospheric
pressure has been studied using ex situ and in situ differential interference
contrast microscopy, atomic force microscopy and scanning electron microscopy.
It is shown that shallow, square etch pits are formed and etching proceeds
by a step mechanism, which implies that the {001} diamond surface is strongly
stabilized. The possible carbon-oxygen complexes which might be responsible
for the stabilization of the {001} diamond surfaces are discussed. At high
etching temperatures the sides of the etch pits are parallel to the [110]
directions. At etching temperatures below 750 degrees C, the sides change
from [110] to [100] directions, as a result of the development of {100}
oriented {100} 'walls' on the sides of the pits. It is suggested that ketone
complexes are responsible for stabilization of the steps in the [110] direction,
whereas the 'walls' are formed due to stabilization of adjacent, colliding
[100] steps. Furthermore, the pits bounded by [110] side faces often have
a concave outline. This phenomenon is explained by step interlacing at
the pit corners, slowly advancing double steps split up into fast single
steps due to the 4(I) symmetry operator perpendicular to the {001} diamond
face.